Recently, the first 12-inch POCl3 vertical furnace in China, supplied by Yukang, was successfully installed at Dingtai Jiangxin's world-first 12-inch bipolar production line in Shanghai, laying a crucial foundation for the project's launch and production.

Semiconductor manufacturing equipment is highly valuable and structurally complex, with extremely exacting requirements regarding the handling environment, vibration control and positioning accuracy. The 12-inch POCL3 vertical furnace installed on this occasion is a core piece of equipment used in the wafer doping process, and consequently demands the utmost stability. Prior to the equipment's arrival, the Yukang project team had already taken up position on-site to conduct a detailed survey of the transport route and identify all potential points of interference. Given the vertical furnace's centre of gravity distribution and anti-vibration requirements, the team selected high-performance air cushion modules as the core execution tools.

During the move-in phase of precision equipment, air cushion trolleys are indispensable for horizontal transport within semiconductor cleanrooms. The core principle involves using compressed air to form an extremely thin air film beneath the airbags, causing the equipment to float above the ground and reducing the coefficient of friction to a minimum. By precisely controlling the inflation of each set of airbags, the Yukang team enabled the equipment to rotate 360° on the spot and achieve precise positioning, ensuring stability and reliability during transport whilst preventing damage and accuracy deviations caused by handling.

From transport and unloading to equipment move-in and precise positioning, the Yukang team worked together efficiently to secure a critical window of opportunity for the production line commissioning at the 12-inch fab. As a one-stop comprehensive service provider for high-tech equipment, Yukang safeguards the stable operation of every piece of equipment on the production line with professional solutions and rigorous standards, helping to ensure the smooth progress of production.